JPH0129784Y2 - - Google Patents

Info

Publication number
JPH0129784Y2
JPH0129784Y2 JP1982165379U JP16537982U JPH0129784Y2 JP H0129784 Y2 JPH0129784 Y2 JP H0129784Y2 JP 1982165379 U JP1982165379 U JP 1982165379U JP 16537982 U JP16537982 U JP 16537982U JP H0129784 Y2 JPH0129784 Y2 JP H0129784Y2
Authority
JP
Japan
Prior art keywords
wafer
ring
etching
etching liquid
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982165379U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5970336U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16537982U priority Critical patent/JPS5970336U/ja
Publication of JPS5970336U publication Critical patent/JPS5970336U/ja
Application granted granted Critical
Publication of JPH0129784Y2 publication Critical patent/JPH0129784Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP16537982U 1982-10-30 1982-10-30 エツチング装置 Granted JPS5970336U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16537982U JPS5970336U (ja) 1982-10-30 1982-10-30 エツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16537982U JPS5970336U (ja) 1982-10-30 1982-10-30 エツチング装置

Publications (2)

Publication Number Publication Date
JPS5970336U JPS5970336U (ja) 1984-05-12
JPH0129784Y2 true JPH0129784Y2 (en]) 1989-09-11

Family

ID=30362338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16537982U Granted JPS5970336U (ja) 1982-10-30 1982-10-30 エツチング装置

Country Status (1)

Country Link
JP (1) JPS5970336U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2857958B2 (ja) * 1992-04-02 1999-02-17 株式会社デンソー エッチングポット

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887336U (ja) * 1981-12-09 1983-06-14 日本電気株式会社 蝕刻装置

Also Published As

Publication number Publication date
JPS5970336U (ja) 1984-05-12

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